New Plasma Cleaner Family LFC063 launched
Balzers, September 05, 2007 - UCP presents its new Plasma Cleaner
family LFC063. All plasma cleaning systems are using a newly developed and
patented hollow cathode discharge plasma process. No surface erosion or
redeposition is caused to the substrates.
LFC063 CW
The plasma cleaner is designed for single-wafer
cleaning in wafer level packaging (WLP), including MEMS and sensor device
packaging. Typical plasma applications include cleaning prior to Solder Bumping,
Solder Reflow, or Wafer Bonding.
More information about the LFC063 CW plasma cleaner
LFC063 CS-V1
The stand-alone multi-strip plasma cleaning system offers high throughput
with the most reliable handling system. It enables fast, easy and reliable
conversion between strip formats. It is best suited for frequently
changing substrates during industrial production.
More information about the LFC063 CS-V1 plasma cleaner
LFC063 CS-V2
The stand-alone multi-strip plasma cleaning system offers simultaneous strip
loading and unloading. A unique magazine buffer station enables continuous
processes. Very high throughputs for defined strip formats will be achived.
More information about the LFC063 CS-V2 plasma cleaner
Contact:
Albert Züger
Phone: +423-388 31 03
Fax: +423 388 37 32 E-mail: albert.zueger@ucp.li
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