Print page
 
ISO 9001/14001
certified

© 2003-2007 UCP

last change: 05-04-2005

Characteristics of LFC plasma cleaning

Image: Oxidized Cu lead frame - Click to enlarge

Oxidized Cu lead frame
 
Image: Cu lead frame after hydrogen plasma cleaning - Click to enlarge
Cu lead frame after hydrogen plasma cleaning

  • Environmentally-friendly process: Usage of non-toxic process gases, no hazardous by-products.

  • High process flexibility: System compatibility for various process gases, optimized cleaning performance by Multi-step processing.

  • Main benefits Plasma Chemical Cleaning (PCC): Removes contaminants such as carbon, oxides, halogens and hydrocarbons through chemical reactions, no surface erosion, no redeposition and no device damage.

  • Main benefits Plasma Physical Cleaning (PPC): Optimized cleaning performance by Multi-step processing, universal cleaning process for all types of materials and substrates, most effective for metallic and non-volatile contaminants.