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last change: 05-30-2005

Schematic of typical Plasma Cleaning Configurations

UCP Plasma Cleaning Systems offer high versatility to meet your specific production needs.

Schematic: Configuration LFC060 / LFC060S - Cleaning chip carrier strips (Automated loading, In-line or I/O Buffers) - Click to enlarge
 

LFC060 CS / LFC060 PS

Cleaning chip carrier strips (Automated loading, In-line or I/O Buffers)

Schematic: Configuration LFC150 / LFC150L - Cleaning chip carriers in magazines (Manual loading of up to 8 magazines) - Click to enlarge
 

LFC150 / LFC150 G / LFC150 L

Cleaning chip carriers in magazines (Manual loading of up to 8 magazines)

Schematic: Configuration LFC101 - Cleaning wafers (Manual loading of 3" or 4" wafers) - Click to enlarge
 

LFC150 / LFC150 G / LFC150 L

Cleaning wafers (Manual loading of 3'' or 4'' wafers)

 

 

Schematic: Configuration LFC150 / LFC 150L - Cleaning wafers (Manual loading of 6" or 8" wafers) - Click to enlarge
 

LFC150 / LFC150 G / LFC150 L

Cleaning wafers (Manual loading of 6'' or 8'' wafers)