LFC060 PS Multi-Strip Plasma Cleaning System

Plasma Physical Cleaning System for Industrial Production The LFC060 PS is configured for multi-strip processing. Built as stand-alone unit, the system is composed of a handler module and a plasma processing module. The handler module manages the magazine transport as well as the strip transport from an individual magazine to the process chamber and back to same position in the magazine. A sophisticated strip-sensing system ensures the highest operation reliability for all types of chip carrier substrates.

Main advantages

• Physical Cleaning (Sputtering) - Universal plasma process with very short cycle times
• Direct Plasma Exposure
• Strip Processing
• Includes a fully-automatic strip and magazines handling system
• Especially useful for wide strips which are difficult to process in magazines
• No need for slotted magazines

Furthermore, the integrated process software ensures traceability of magazine, strip, and plasma processing parameters which are all stored in a data file.

Automatic magazine and strip handling system for continuous operation. Easy and fast conversion between different strip formats. No special tools needed.		Strip damage during handling is prevented by use of force sensors for push and pull.