LFC060 PS Multi-Strip Plasma Physical Cleaning System - Technical Data

Process Gas consumption

• Argon (Ar): < 50 sccm
• Argon/Hydrogen (Ar/H₂ 96/4): < 50 sccm
• Argon/Nitrogen (Ar/N₂ 85/15): < 50 sccm
• Argon/Oxygen (Ar/O₂ 92/8): < 50 sccm
• Venting gas N₂: 300 litre/h

System

• Strip handling: automatic
• Throughput [strips/h]: up to 400 (depending on strip width and stiffness)
• No. of strips per load: up to 6

Dimensions and Weights

• All dimensions in mm
• Weight: 560 kg net
• Compact design - easy access to media and components

Patents, standards and certifications

• Patented Hydrogen Process (US 6203637)
• TÜV Report (gas safety)
• SEMI Standard S2 / S8 reported
• ISO 9001 and ISO 14001 registered
• CE certified

Downloads
 

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