LFC063 CS-V1 Plasma Cleaner for Industrial Production

Plasma Chemical Cleaning System for Industrial Production The LFC063 CS-V1 plasma cleaner is designed for high throughput and enables fast, easy and reliable conversion between strip formats. The LFC063 CS-V1 is best suited for smaller lot sizes, single magazines, or wide substrates. Its slim design requires little floor space. The plasma cleaner is configured for multi-strip processing.

Built as stand alone unit, the LFC063 CS-V1 is composed of a handler module and a plasma processing module. The handler module of the LFC063 CS-V1 manages the magazine transport as well as the strip transport from an individual magazine to the process chamber and back to the same position in the magazine.

A sophisticated strip-sensing system ensures the highest operation reliability for all types of chip carrier substrates. Furthermore, the integrated process software ensures traceability of magazine, strip, and plasma processing parameters which are all stored in a data file.

Main advantages

• High throughput, especially for wide strips
• Enables fast, easy, and reliable conversion between strip formats
• Best suited for small lot sizes or single magazines

Automatic magazine and strip handling system for continuous operation. Easy and fast conversion between different strip formats. No special tools needed.		Strip damage during handling is prevented by use of force sensors for push and pull.