Multi-Strip Plasma Chemical Cleaning System for Industrial Production
The LFC063 CS-V2 is designed for very high throughput for defined strip
formats. Its unique magazine buffer station enables continuous
processes. The system is configured for multi-strip
processing. Built as stand alone unit, the LFC063 CS-V2 is composed of a
handler module and a plasma processing module.
The handler module of the
LFC063 CS-V2 manages the transportation of several magazines as well as
the loading/unloading of several strips simultaneously from individual
magazines to the process chamber and back to the same positions in the
magazines. Furthermore, the integrated software stores all plasma
processing parameters in a data file. |