LFC063 CS-V2 Plasma Cleaning System for Industrial Production - Technical Data

Process Gas consumption

• Argon (Ar): < 200 sccm
• Argon/Hydrogen (Ar/H₂ 96/4): < 200 sccm
• Argon/Nitrogen (Ar/N₂ 85/15): < 200 sccm
• Argon/Oxygen (Ar/O₂ 92/8): < 200 sccm
• Venting gas N₂: 600 litre/h

System

• Strip handling: automatic
• Throughput [strips/h]: up to 500; depending on strip width; given value for 5 strips (width = 63 mm) per load
• No. of strips per load: variable

Dimensions and Weights
 

• All dimensions in mm
• Weight: 600 kg net
• Compact design - easy access to media and components

Patents, standards and certifications

• Patented Hydrogen process (US 6203637)
• Patented Nitrogen process (US 66051175)
• TÜV Report (gas safety)
• SEMI Standard S2 / S8 / S14 reported
• ISO 9001 and ISO 14001 registered
• CE certified

Downloads
 

      LFC063 CS-V2 Brochure