LFC150 L Plasma Cleaning System - Technical Data

Process Gas consumption

• Argon/Hydrogen (Ar/H₂ 96/4) : 15 - 50 sccm
• Argon/Nitrogen (Ar/N₂ 85/15) : 15 - 50 sccm
• Venting gas N₂: 900 litre/h

System

• Handling of slotted magazines: manual
• Throughput [strips/h]: 750
• Loading capacity [slotted magazines]: 8

Option

• Wafer holder
• Second gas supply

Dimensions and Weights

• All dimensions in mm
• Weight: 580 kg net
• Compact design - easy access to media and components

Patents, standards and certifications

• Patented Hydrogen Process (US 6203637)
• TÜV Report (gas safety)
• SEMI Standard S2 / S8 reported
• ISO 9001 and ISO 14001 registered
• CE certified

Downloads
 

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