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Ultra Clean Processing Products

Image: LFC060 CS

LFC060 CS

Image: LFC060 PS

LFC060 PS

Multi-Strip Plasma Cleaning System Multi-Strip Plasma Cleaning System
Image: LFC060 CS

LFC063 CS-V1

Image: LFC060 PS

LFC063 CS-V2

Multi-Strip Plasma Cleaning System for Industrial Production (frequent strip format change) Multi-Strip Plasma Cleaning System for Industrial Production (defined strip formats)
Image: LFC102

LFC063 CW

Image: LFC150

LFC102

Single-Wafer Plasma Cleaning System for Industrial Production Plasma Cleaning System for process development in Wafer Level Packaging and Flip Chip applications
Image: LFC150 G

LFC150

Image: LFC150 L

LFC150 G

Configured for batch plasma processing of strips placed in slotted magazines and of wafers Dedicated operation with premixed gases
Image: LFC150 G

LFC150 L

   
Dedicated operation with premixed gases